Process Service・Test Wafer

We will offer a variety of deposition processes and various films with wafer of research and development applications involved in the semiconductor manufacturing process.
Rich processing menu of specialized manufacturer unique will meet the various needs of customers.
In addition, its own super-thick thermal oxide film formation technology is the material that is essential
to the optical device to support the optical communication.
Our products and technologies have been adopted to communication equipment
manufacturers and optical component manufacturers worldwide.

>Thick film applications here

Process Line-up

TypeMethodFilm Type
Thermal Oxide Thermal Oxidation Thin thermal oxide film
Super-thick thermal oxide film
LP-CVD LP-SiO2
HTO
LP-TEOS
PE-CVD PE-SiO2
PE-TEOS
HDP
Low-k(BD、BDⅡ、AURORA、CORAL)
PSG
NSG
BPSG
Spin-coated SOG
Annealing oven RTO
Nitride LP-CVD LP-SiN
PE-CVD PE-SiN
Si LP-CVD Poly-Si
Amorphous-Si
Organic Spin-coated G-Line resist
I-Line resist
KrF resist
ArF resist
Polyimide(Photosensitive、Non-Photosensitive)
Metal Sputter Al、Al-Si、Al-Si-Cu、Al-Cu
Ti、TiN
Ta、TaN
Cr
Cu
W
Ni
Au
Pt
ITO
Plating Ti、Ni、Au、Cu
CVD W-Si

There are also things that can’t be processed by the wafer size.
In addition, because the other films can also, please say a hope. Please contact us for details.

Our Clean Room
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Process Service

“Super-thick thermal oxide film” applications
Undercladding wafer for AWG

With respect to optical waveguides (AWG), the so-called undercladding layer, which is the lowermost SiO2 film, has a critical effect on the process yield.The Super-thick thermal oxidized films of KST World have the leading share of the global market thanks to their excellent surface cleanliness and stable film quality.

Guaranteed specifications

ItemSpecification
Film thickness 20um±5%(Maximum thickness)
In-plane uniformity ±0.5%
Surface uniformity ±0.5%
Refractive index(@1550nm) 1.4458±0.0001

Standard product line-up

SizeWafer thicknessThermal oxidized film thickness
4 inches 525um 1mm 15um、20um
6 inches 625um 675um 1mm 15um、20um
8 inches 725um 15um、20um
12 inches 775um 15um

※The above wafer size and thickness, are described our standard products.
※Other sizes and thicknesses are also available. (Up to a maximum thickness of 30μm)

Refractive index plane distribution data
屈折率面内分布データ
Surface roughness data
表面粗さデータ